AGC can make through vias in thin glass substrate by the patterns of customers’ requirements. AGC expects TGV substrate in the use of 3D integration for semiconductor packaging, and other wide variety of fields.
Miniaturization
It enables micro wiring with excellent flatness, shape stability, and through fine via of the glass.
High speed
It enables high speed and large capacity communication with excellent high frequency properties, through high insulation and low dielectric loss tangent of the glass.
High reliability
It is best suited to the semiconductor packaging with non-alkali glass and coefficient of thermal expansion close to Si.
High productivity
It can support a wafer, as well as a panel size.
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Glass material |
EN-A1 (Non-alkali glass) |
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Size |
Wafer: φ150mm, φ200mm, φ300mm |
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Panel: ~550x650mm (Gen.3) |
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Sheet thickness |
0.1mmt~0.5mmt |
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Hole type |
Through Via, Blind Via |
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Hole shape |
Straight, Taper, Hourglass |
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Hole diameter |
φ20μm~φ150μm |
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Pitch |
MIN. hole diameter × 2 |
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